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Bibliographic Details
Published in:	Journal of electronic materials Vol. 38; no. 8; p. 1521
Main Authors:	Sivananthan, S., Anter, Y., Dhar, N.K.
Format:	Journal Article
Language:	English
Published:	Boston Springer US 2009
Subjects:	Characterization and Evaluation of Materials Chemistry and Materials Science Electronics and Microelectronics Instrumentation Materials Science Optical and Electronic Materials Solid State Physics
Online Access:	Get full text
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ISSN:	0361-5235 1543-186X
DOI:	10.1007/s11664-009-0812-5