The Mobility of Negative Ions in hbox CF 3 hbox I , hbox CF 3 hbox I a hbox N 2 , hbox CF 3 hbox I a hbox Ar , hbox CF 3 hbox I a hbox Xe , hbox C 2 hbox F 6 , and hbox CHF 3 , and of Positive Ions in hbox C 2 hbox F 4 and hbox c a C 4 hbox F 8

• Published in: IEEE transactions on plasma science Vol. 37; no. 9
• Main Authors: de Urquijo, J, Juarez, A M
• Format: Journal Article
• Language: English
• Published: 01-01-2009
• Subjects: Dipole moment; Drift; Ion motion; Ionization; Law; Mathematical analysis; Negative ions; Positive ions
• ISSN: 0093-3813
• DOI: 10.1109/TPS.2009.2022362

Using a pulsed Townsend technique, the drift velocity and the mobility of positive ions in C sub(2)F sub(4) and C sub(4)F sub(8) and those of negative ions in C sub(2)F sub(6), CHF sub(3), and CF sub(3)I and its mixtures with N sub(2), Ar, and Xe are reported. The overall range of the density-normalized electric field is 4-600 times10 super(-17) super(-) super(V)ldrcm super(2). Ion identification is provided by means of previous studies on partial ionization and electron attachment. Thus, it is suggested that the predominant drifting ion in the discharge is C sub(2)F sub(4) super(+) for C sub(2)F sub(4) and c-C sub(4)F sub(8), F super(-) for C sub(2)F sub(6) and CHF sub(3), and I super(-) for CF sub(3)I. The use of more comprehensive theories of ion motion considering the influence of a permanent dipole moment (CHF sub(3) and CF sub(3)I) has provided reasonable agreement between low-field measured and calculated mobilities. The mobility of negative ions in CF sub(3)I-N sub(2), CF sub(3)I-Ar, and CF sub(3)I-Xe mixtures agrees reasonably well with the predicted values by BlancE14s law.