Poly(Dimethylsiloxane) Waveguide Cantilevers for Optomechanical Sensing
The optical and structural properties of poly(dimethylsiloxane) (PDMS) are considered to define disposable cantilever-based micooptoelectromechanical systems (MOEMS) by ways of soft lithography and with a high degree of monolithic integration. The very low Youngas modulus of this material relaxes th...
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| Published in: | IEEE photonics technology letters Vol. 21; no. 2; pp. 79 - 81 |
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| Main Authors: | , , , , , , , |
| Format: | Journal Article |
| Language: | English |
| Published: |
15-01-2009
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| Online Access: | Get full text |
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| Summary: | The optical and structural properties of poly(dimethylsiloxane) (PDMS) are considered to define disposable cantilever-based micooptoelectromechanical systems (MOEMS) by ways of soft lithography and with a high degree of monolithic integration. The very low Youngas modulus of this material relaxes the dimensionsa requirements, being then possible to define thick PDMS structures with a sensitivity comparable to nanometer scale silicon counterparts. Experimental results using a light-emitting diode working at 670 nm have determined the resonant frequencies of the proposed MOEMS and are in agreement with the numerical simulations done. Finally, when a 2-mu L droplet of ethanol (1.58 mg) is dispensed on the cantilever, relative losses rise to 25 dB, returning to its initial value when the droplet evaporates. |
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| Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 content type line 23 ObjectType-Feature-1 |
| ISSN: | 1041-1135 |
| DOI: | 10.1109/LPT.2008.2008659FirstPublished:2008-10-31 |