Effects of processing on electrical properties of YBa sub 2 Cu sub 3 O sub 7 films: II, In situ deposition processes
The effects of several patterning process steps on J sub c and surface resistance of YBCO films are described. Included are two off-axis sputtering processes and a metallorganic CVD process, all producing in situ superconducting films with c-axis epitaxial orientation. 43 refs.
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| Published in: | Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vol. 12; no. 2; pp. 388 - 392 |
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| Main Authors: | , , |
| Format: | Journal Article |
| Language: | English |
| Published: |
01-01-1994
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| Online Access: | Get full text |
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| Summary: | The effects of several patterning process steps on J sub c and surface resistance of YBCO films are described. Included are two off-axis sputtering processes and a metallorganic CVD process, all producing in situ superconducting films with c-axis epitaxial orientation. 43 refs. |
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| Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 content type line 23 ObjectType-Feature-1 |
| ISSN: | 0734-2101 |