Critical-layer thickness of a pseudomorphic In(0.8)Ga(0.2)As heterostructure grown on InP

A very high electron mobility pseudomorphic In(0.8)Ga(0.2)As heterostructure is successfully grown on InP both by the elimination of the overshoot of flux densities and by the precise control of the flux ratio through a new calibration technique of reflection high-energy electron diffraction oscilla...

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Bibliographic Details
Published in:Applied physics letters Vol. 58; pp. 2420 - 2422
Main Authors: TACANO, MUNECAZU, Sugiyama, Yoshinobu, Takeuchi, Yukihiro
Format: Journal Article
Language:English
Published: 27-05-1991
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Summary:A very high electron mobility pseudomorphic In(0.8)Ga(0.2)As heterostructure is successfully grown on InP both by the elimination of the overshoot of flux densities and by the precise control of the flux ratio through a new calibration technique of reflection high-energy electron diffraction oscillations in a molecular beam epitaxy system. The critical- layer thickness for the pseudomorphic growth of InGaAs on InP is found to follow the energy balance model, and a very high two-dimensional electron gas mobility of over 1.5 sq m/V s and over 15 sq m/V s at 293 and 10 K, respectively, is obtained. (Author)
Bibliography:ObjectType-Article-2
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ISSN:0003-6951