hbox Zr 0.27 hbox Ti 0.73 hbox O 2 -Based MSM Ultraviolet Detectors With Pt Electrodes

• Published in: IEEE electron device letters Vol. 32; no. 5; pp. 653 - 655
• Main Authors: Zhang, Haifeng, Ruan, Shengping, Xie, Tianjiao, Feng, Caihui, Qu, Pengfei, Chen, Weiyou, Dong, Wei
• Format: Journal Article
• Language: English
• Published: 01-05-2011
• Subjects: Detectors; Devices; Electrodes; Platinum; Thin films; Titanium; X-ray photoelectron spectroscopy; Zirconium dioxide
• ISSN: 0741-3106; 1558-0563
• DOI: 10.1109/LED.2011.2110633

In this letter, visible-blind ultraviolet (UV) photodetectors based on hbox Zr 0.27 hbox Ti 0.73 hbox O 2 thin films with Pt electrodes were fabricated. The hbox Zr 0.27 hbox Ti 0.73 hbox O 2 thin films were prepared via the sol-gel method and characterized by means of X-ray diffraction, scanning electron microscopy, XPS, and UV-visible absorption spectra. At 5-V bias, the dark current of the detector was only 6 nA. Under the irradiation of 300-nm UV light, a high responsivity of 702.5 A/W was achieved due to the high internal gain. The high gain is caused by the introduction of zirconia. The rise and fall times of the device were 896.6 and 578.1 ms, respectively. Compared with hbox TiO 2 -based detectors, the hbox Zr 0.27 hbox Ti 0.73 hbox O 2 -based detector with Pt electrodes exhibits a much higher responsivity, a faster recovery time, and a wider detection range.