Study of TiO sub(2) thin films on Si substrate by the photoacoustic elastic bending method

• Published in: Science China. Physics, mechanics & astronomy Vol. 56; no. 7; pp. 1285 - 1293
• Main Authors: Todorovic, D M, Rabasovic, MD, Markushev, D D, Franko, M, Stangar, U L
• Format: Journal Article
• Language: English
• Published: 01-07-2013
• Subjects: Astronomy
• ISSN: 1674-7348
• DOI: 10.1007/s11433-013-5121-6

The quantitative photoacoustic investigation of different TiO sub(2) thin films on Si substrates is presented using the elastic bending method. Photoacoustic signal amplitude and phase spectra versus modulation frequency were measured and analyzed using different sample thicknesses. Within the proposed method particular attention is given to the analysis of optical, thermal, elas-tic and structural sample parameters. Considerable focus is devoted to the fitting procedure of experimental results using the two-layer sample theoretical model. Characteristics of previously developed photoacoustic apparatus are discussed, attempting to search the ideal experimental conditions which can provide a good signal-to-noise ratio and sensitivity.