Effect of Airgap Deep Trench Isolation on the Gamma Radiation Behavior of a 0.13 [Formula Omitted] SiGe:C NPN HBT Technology

Effect of Airgap Deep Trench Isolation on the Gamma Radiation Behavior of a 0.13 [Formula Omitted] SiGe:C NPN HBT Technology

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Bibliographic Details
Published in:IEEE transactions on nuclear science Vol. 56; no. 4; p. 2198
Main Authors: Put, S, Simoen, E, Van Huylenbroeck, S, Claeys, C, Van Uffelen, M, Leroux, P
Format: Journal Article
Language:English
Published: New York The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 01-08-2009
Online Access:Get full text
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Description
ISSN:0018-9499
1558-1578
DOI:10.1109/TNS.2009.2018277