MOCVD Growth of Compositionally Graded Ba^sub x^Sr^sub 1-x^TiO^sub 3^ Thin Films

This paper describes an MOCVD technique for producing both monolithic and compositionally graded ... (BST) thin films for tunable RF device applications. Specifically, we describe a "multiple injection flash evaporation" technique, which can easily produce BST thin films with a wide variet...

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Bibliographic Details

Published in:	Integrated ferroelectrics Vol. 126; no. 1; p. 21
Main Authors:	Sbrockey, N M, Cole, M W, Kalkur, T S, Luong, M, Spanier, J E, Tompa, G S
Format:	Journal Article
Language:	English
Published:	Philadelphia Taylor & Francis Ltd 01-01-2011
Subjects:	Chemical vapor deposition Dielectrics Thin films
Online Access:	Get full text
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