MOCVD Growth of Compositionally Graded Ba^sub x^Sr^sub 1-x^TiO^sub 3^ Thin Films

This paper describes an MOCVD technique for producing both monolithic and compositionally graded ... (BST) thin films for tunable RF device applications. Specifically, we describe a "multiple injection flash evaporation" technique, which can easily produce BST thin films with a wide variet...

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Bibliographic Details
Published in:	Integrated ferroelectrics Vol. 126; no. 1; p. 21
Main Authors:	Sbrockey, N M, Cole, M W, Kalkur, T S, Luong, M, Spanier, J E, Tompa, G S
Format:	Journal Article
Language:	English
Published:	Philadelphia Taylor & Francis Ltd 01-01-2011
Subjects:	Chemical vapor deposition Dielectrics Thin films
Online Access:	Get full text
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Summary:	This paper describes an MOCVD technique for producing both monolithic and compositionally graded ... (BST) thin films for tunable RF device applications. Specifically, we describe a "multiple injection flash evaporation" technique, which can easily produce BST thin films with a wide variety of compositional grading and dopant profiles. Preliminary results show the films to have excellent voltage standoff properties and tunability of dielectric permittivity. These materials are presently being used in the development of tunable RF filters for communication and radar applications. (ProQuest: ... denotes formulae/symbols omitted.)
ISSN:	1058-4587 1607-8489