Growth and Characterization of Na^sub 0.5^Bi^sub 0.5^TiO^sub 3^ Thin Films with BaTiO^sub 3^ Buffer Layer (Study of Au/Na^sub 0.5^Bi^sub 0.5^TiO^sub 3^/BaTiO^sub 3^/Pt Capacitor)
Lead free bilayer capacitor structure has been fabricated as a combination of sodium bismuth titanate (Na^sub 0.5^Bi^sub 0.5^)TiO^sub 3^ (NBT) thin films with barium titanate, (BaTiO^sub 3^ (BT) buffer layer in situ using pulsed laser deposition (PLD). PLD control parameters have been optimized usin...
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Published in: | Ferroelectrics Vol. 447; no. 1; p. 46 |
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Main Authors: | , , |
Format: | Journal Article |
Language: | English |
Published: |
Philadelphia
Taylor & Francis Ltd
01-01-2013
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Subjects: | |
Online Access: | Get full text |
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Summary: | Lead free bilayer capacitor structure has been fabricated as a combination of sodium bismuth titanate (Na^sub 0.5^Bi^sub 0.5^)TiO^sub 3^ (NBT) thin films with barium titanate, (BaTiO^sub 3^ (BT) buffer layer in situ using pulsed laser deposition (PLD). PLD control parameters have been optimized using Taguchi approach to obtain good quality NBT and BT thin films. It has been observed that dielectric properties of NBT thin films enhanced by inserting BT buffer layer. This improvement in the dielectric properties of NBT thin films have been discussed in relation to the effect of the buffer layer on the structure, microstructure and interface of the NBT/BT multilayer capacitor. [PUBLICATION ABSTRACT] |
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ISSN: | 0015-0193 1563-5112 |