Twist filter for the removal of macroparticles from cathodic arc plasmas
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| Published in: | Surface & coatings technology Vol. 133-34; pp. 96 - 100 |
|---|---|
| Main Authors: | , |
| Format: | Conference Proceeding |
| Language: | English |
| Published: |
Lausanne
Elsevier
2000
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| Subjects: | |
| Online Access: | Get full text |
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| Author | MACGILL, Robert A ANDERS, André |
|---|---|
| Author_xml | – sequence: 1 givenname: André surname: ANDERS fullname: ANDERS, André organization: Lawrence Berkeley National Laboratory, I Cyclotron Road, Mailstop 53, Berkeley, CA 94720, United States – sequence: 2 givenname: Robert A surname: MACGILL fullname: MACGILL, Robert A organization: Lawrence Berkeley National Laboratory, I Cyclotron Road, Mailstop 53, Berkeley, CA 94720, United States |
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| Keywords | Thin films Amorphous material Magnetic fields Experimental study Carbon Plasma deposition |
| Language | English |
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| MeetingName | Proceedings of the 27th International Conference on Metallurgical Coatings and Thin Films, San Diego, California, April 10-14, 2000 |
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| StartPage | 96 |
| SubjectTerms | Cross-disciplinary physics: materials science; rheology Exact sciences and technology Materials science Methods of deposition of films and coatings; film growth and epitaxy Physics Vacuum deposition |
| Title | Twist filter for the removal of macroparticles from cathodic arc plasmas |
| Volume | 133-34 |
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