Twist filter for the removal of macroparticles from cathodic arc plasmas

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Bibliographic Details
Published in:	Surface & coatings technology Vol. 133-34; pp. 96 - 100
Main Authors:	ANDERS, André, MACGILL, Robert A
Format:	Conference Proceeding
Language:	English
Published:	Lausanne Elsevier 2000
Subjects:	Cross-disciplinary physics: materials science; rheology Exact sciences and technology Materials science Methods of deposition of films and coatings; film growth and epitaxy Physics Vacuum deposition Thin films Amorphous material Magnetic fields Experimental study Carbon Plasma deposition
Online Access:	Get full text
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ISSN:	0257-8972 1879-3347