Pulse-field-assisted water bonding for silicon on insulator

Pulse-field-assisted water bonding for silicon on insulator

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Bibliographic Details
Published in:Japanese journal of applied physics Vol. 31; no. 6A; pp. 1709 - 1715
Main Authors: ARIMOTO, Y, SUGIMOTO, F
Format: Journal Article
Language:English
Published: Tokyo Japanese journal of applied physics 1992
Subjects:
Applied sciences
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Heat treatment
Insulator
Silicon
Rough surface
Void
Wafer
Electrostatic force
Online Access:Get full text
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Description
ISSN:0021-4922
1347-4065