Theoretical and experimental study of linear motors using surface acoustic waves Technical Digest for Transducers '97

• Published in: Sensors and actuators. A. Physical. Vol. 70; no. 1-2; pp. 67 - 74
• Main Authors: HELIN, P, SADAUNE, V, DRUON, C
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier Science 1998
• Subjects: Acoustics; Applied sciences; Condensed matter: structure, mechanical and thermal properties; Electronics; Exact sciences and technology; Fundamental areas of phenomenology (including applications); Mechanical and acoustical properties; adhesion; Microelectronic fabrication (materials and surfaces technology); Physics; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Solid surfaces and solid-solid interfaces; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Transduction; acoustical devices for the generation and reproduction of sound; Microelectronic fabrication; Friction; Ultrasonic motors; Acoustic surface waves; Linear motor; Experimental study; Motion control; Modeling; Electromechanical system
• ISSN: 0924-4247