Fabrication of free standing LiNb03 single crystal micro-platelets and their integration to Si-on-insulator platforms
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| Published in: | Thin solid films Vol. 519; no. 13; pp. 4271 - 4276 |
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| Main Authors: | , , , |
| Format: | Journal Article |
| Language: | English |
| Published: |
Amsterdam
Elsevier
2011
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| Author | STEIER, William H YOO SEUNG LEE LEE, Wan-Gyu LEE, Sang-Shin |
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| Author_xml | – sequence: 1 surname: YOO SEUNG LEE fullname: YOO SEUNG LEE organization: Department of Electrical Engineering, University of Southern California, Los Angeles, California 90007, United States – sequence: 2 givenname: Sang-Shin surname: LEE fullname: LEE, Sang-Shin organization: Department of Electrical Engineering, University of Southern California, Los Angeles, California 90007, United States – sequence: 3 givenname: Wan-Gyu surname: LEE fullname: LEE, Wan-Gyu organization: National Nanofab Center, Korea Advanced Institute of Science and Technology, Deajeon, Korea, Republic of – sequence: 4 givenname: William H surname: STEIER fullname: STEIER, William H organization: Department of Electrical Engineering, University of Southern California, Los Angeles, California 90007, United States |
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| Issue | 13 |
| Keywords | Atomic force microscopy Scanning electron microscopy Ion implantation Annealing Lithium niobate' thin films Roughness Field emission Electro-optic material XRD Heat treatments Thin films Direct method Monocrystals Blood platelets Silicon oxides Wafers Lithium niobates Waveguides Silicon Crystal ion slicing Crystal structure |
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| SubjectTerms | Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Defects and impurities in crystals; microstructure Doping and impurity implantation in other materials Electron and ion emission by liquids and solids; impact phenomena Exact sciences and technology Field emission, ionization, evaporation, and desorption Physics Structure and morphology; thickness Structure of solids and liquids; crystallography Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology |
| Title | Fabrication of free standing LiNb03 single crystal micro-platelets and their integration to Si-on-insulator platforms |
| Volume | 519 |
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