Fabrication of free standing LiNb03 single crystal micro-platelets and their integration to Si-on-insulator platforms

• Published in: Thin solid films Vol. 519; no. 13; pp. 4271 - 4276
• Main Authors: YOO SEUNG LEE, LEE, Sang-Shin, LEE, Wan-Gyu, STEIER, William H
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier 2011
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Defects and impurities in crystals; microstructure; Doping and impurity implantation in other materials; Electron and ion emission by liquids and solids; impact phenomena; Exact sciences and technology; Field emission, ionization, evaporation, and desorption; Physics; Structure and morphology; thickness; Structure of solids and liquids; crystallography; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; Atomic force microscopy; Scanning electron microscopy; Ion implantation; Annealing; Lithium niobate' thin films; Roughness; Field emission; Electro-optic material; XRD; Heat treatments; Thin films; Direct method; Monocrystals; Blood platelets; Silicon oxides; Wafers; Lithium niobates; Waveguides; Silicon; Crystal ion slicing; Crystal structure
• ISSN: 0040-6090; 1879-2731