Effects of background gas-plume interaction in the deposition of SiNx films

Effects of background gas-plume interaction in the deposition of SiNx films

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Bibliographic Details
Published in:Applied surface science Vol. 127-29; pp. 1005 - 1010
Main Authors: SAMANO, E. C, MACHORRO, R, SOTO, G, COTA-ARAIZA, L
Format: Conference Proceeding
Language:English
Published: Amsterdam Elsevier Science 1998
Subjects:
Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Laser deposition
Materials science
Methods of deposition of films and coatings; film growth and epitaxy
Physics
Inorganic compounds
Silicon nitrides
Laser ablation technique
Experimental study
TEM
Film growth
Ellipsometry
Online Access:Get full text
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Description
ISSN:0169-4332
1873-5584