Electronic properties of silicon thin films prepared by hot-wire chemical vapour deposition

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Bibliographic Details
Published in:Journal of non-crystalline solids Vol. 266-69; pp. 258 - 262
Main Authors: BRÜGGEMANN, R, KLEIDER, J. P, LONGEAUD, C, MENCARAGLIA, D, GUILLET, J, BOUREE, J. E, NIIKURA, C
Format: Conference Proceeding
Language:English
Published: Amsterdam Elsevier 2000
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ISSN:0022-3093
1873-4812