Electronic properties of silicon thin films prepared by hot-wire chemical vapour deposition
Saved in:
Published in: | Journal of non-crystalline solids Vol. 266-69; pp. 258 - 262 |
---|---|
Main Authors: | , , , , , , |
Format: | Conference Proceeding |
Language: | English |
Published: |
Amsterdam
Elsevier
2000
|
Subjects: | |
Online Access: | Get full text |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
ISSN: | 0022-3093 1873-4812 |
---|