Production of Cr-N films by ion beam-assisted deposition technology: experiment and computer simulation

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Bibliographic Details
Published in:	Surface & coatings technology Vol. 163-64; pp. 286 - 292
Main Authors:	GUGLYA, A. G, MARCHENKO, I. G, MALYKHIN, D. G, NEKLYUDOV, I. M
Format:	Conference Proceeding
Language:	English
Published:	Lausanne Elsevier 2003
Subjects:	Cross-disciplinary physics: materials science; rheology Exact sciences and technology Ion and electron beam-assisted deposition; ion plating Materials science Methods of deposition of films and coatings; film growth and epitaxy Physics Thin films Chromium nitrides Electrical properties Computerized simulation Ion beam assisted deposition method Nitrogen Experimental study Depth profiles Physical properties
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ISSN:	0257-8972 1879-3347