FTIR phase-modulated ellipsometry measurements of microcrystalline silicon films deposited by hot-wire CVD

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Bibliographic Details
Published in:	Journal of non-crystalline solids Vol. 299302; pp. 215 - 219
Main Authors:	GARCIA-CAUREL, E, NIIKURA, C, KIM, S. Y, DREVILLON, B, BOUREE, J. E
Format:	Conference Proceeding
Language:	English
Published:	Amsterdam Elsevier 2002
Subjects:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Exact sciences and technology Infrared and raman spectra and scattering Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Other nonmetallic inorganics Physics Raman spectra Phase modulation Amorphous state Infrared spectra Experimental study Ellipsometry Thin films CVD Hydrogen bonds Vibrational modes Fourier transform spectra Silicon Absorption spectra Microstructure Microcrystal
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ISSN:	0022-3093 1873-4812