Mechanical characterizations of diamond carbon films made by PACVD

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Bibliographic Details
Published in:	Surface & coatings technology Vol. 151-52; pp. 170 - 174
Main Authors:	DJEMIA, P, TETARD, F, GANOT, F, MET, C, DEBARROS, M. I, VANDENBULCKE, L
Format:	Conference Proceeding
Language:	English
Published:	Lausanne Elsevier 2002
Subjects:	Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Cross-disciplinary physics: materials science; rheology Exact sciences and technology Materials science Methods of deposition of films and coatings; film growth and epitaxy Physics Elastic constants Vanadium alloys Synthetic diamond Light scattering Diamonds Ternary alloys Mechanical properties Elastic waves Experimental study Carbon Titanium base alloys Thin films CVD Wettability Aluminium alloys PECVD
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ISSN:	0257-8972 1879-3347