Friction and wear performance of diamond-like carbon films grown in various source gas plasmas

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Bibliographic Details
Published in:	Surface & coatings technology Vol. 120-21; pp. 589 - 593
Main Authors:	ERDEMIR, A, NILUFER, I. B, ERYILMAZ, O. L, BESCHLIESSER, M, FENSKE, G. R
Format:	Conference Proceeding
Language:	English
Published:	Lausanne Elsevier 1999
Subjects:	Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Cross-disciplinary physics: materials science; rheology Exact sciences and technology Materials science Methods of deposition of films and coatings; film growth and epitaxy Physics Thin films CVD Friction Synthetic diamond Wear PECVD Experimental study Diamond structure Carbon Plasma sources Tribological coatings
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ISSN:	0257-8972 1879-3347