Design, Fabrication, and Testing of a TiN Ti TiN Trilayer KID Array for 3mm CMB Observations

• Published in: Journal of low temperature physics Vol. 184; no. 3
• Main Authors: Lowitz, A. E., Brown, A. D., Mikula, V., Stevenson, T. R., Timbie, P. T., Wollack, E. J.
• Format: Journal Article
• Language: English
• Published: Goddard Space Flight Center Springer 23-03-2016
• Subjects: Astrophysics; Kinetic Inductance Detectors (kids); Passive Frequency-Domain Multiplexing; Cmbb-Mode
• ISSN: 1573-7357

Kinetic inductance detectors (KIDs) are a promising technology for astronomical observations over a wide range of wavelengths in the mm and sub-mm regime. Simple fabrication, in as little as one lithographic layer, and passive frequency-domain multiplexing, with readout of up to 1000 pixels on a single line with a single cold amplifier, make KIDs an attractive solution for high-pixel-count detector arrays. We are developing an array that optimizes KIDs for optical frequencies near 100GHz to expand their usefulness in mm-wave applications, with a particular focus on CMBB-mode measurement efforts in association with the QUBIC telescope. We have designed, fabricated, and tested a 20-pixel prototype array using a simple quasi lumped microstrip design and pulsed DC reactive magnetron-sputtered TiNTiTiN trilayer resonators, optimized for detecting 100GHz (3mm) signals. Here we present a discussion of design considerations for the array, as well as preliminary detector characterization measurements and results from a study of TiN trilayer properties.