MEMS Pressure and Acceleration Sensors for Automotive Applications

MEMS Pressure and Acceleration Sensors for Automotive Applications

This paper reviews MEMS product applications in a very demanding automotive environment. Our particular interest is in the MEMS inertial and pressure sensors. Specifics of transducer manufacturing technologies will be explained in details. Also advantages and disadvantages of piezoresistive versus c...

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Bibliographic Details
Published in:SAE transactions Vol. 112; pp. 181 - 188
Main Authors: Verma, Rajan, Gogoi, Bishnu P., Mladenovic, Dragan
Format: Journal Article
Language:English
Published: Society of Automotive Engineers, Inc 01-01-2003
Online Access:Get full text
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Summary:This paper reviews MEMS product applications in a very demanding automotive environment. Our particular interest is in the MEMS inertial and pressure sensors. Specifics of transducer manufacturing technologies will be explained in details. Also advantages and disadvantages of piezoresistive versus capacitive sensing phenomena will be discussed. Finally, main aspects of the packaging effects on the final device parameters and performance are considered too.
ISSN:0096-736X
2577-1531