Quantum well intermixing technologies for quasi-phase-matching gratings

• Published in: LEOS 2000. 2000 IEEE Annual Meeting Conference Proceedings. 13th Annual Meeting. IEEE Lasers and Electro-Optics Society 2000 Annual Meeting (Cat. No.00CH37080) Vol. 2; pp. 712 - 713 vol.2
• Main Authors: Helmy, A.S., Hutchings, D.C., Kleckner, T.C., Aitchison, J.S., Bryce, A.C., Marsh, J.H., Martin, P., Landesman, J.P., Brown, C.T.A., Moutzouris, K., Ebrahimzadeh, M., Ayling, S.G.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 2000
• Subjects: Area measurement; Chemical technology; Chemical vapor deposition; Frequency conversion; Gallium arsenide; Gratings; Plasma chemistry; Plasma waves; Stress measurement; Superlattices
• ISBN: 9780780359475; 078035947X
• ISSN: 1092-8081; 2766-1733
• DOI: 10.1109/LEOS.2000.894052

Most of the studies carried out to date on the spatial selectively of the quantum well intermixing process have involved characterising either large intermixed areas, or sub 1 /spl mu/m features for 1D and 0D confinement potentials. Features that lie in the range of 1-10 /spl mu/m are of interest because they can be used to realise various devices such as waveguides, and domain disordering for quasi-phase matching (QPM). In this paper different technologies were investigated to fabricate QPM gratings in GaAs/AlAs superlattice waveguides.