Novel Method of Ion Energy and Ion Energy Distribution Function Control at the Substrate during Plasma Processing

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Bibliographic Details
Published in:	IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th IEEE International Conference (Cat. No.99CH36297) p. 99
Main Authors:	Want, H., Wendt, A.E.
Format:	Conference Proceeding
Language:	English
Published:	IEEE 1999
Subjects:	Distribution functions Plasma chemistry Plasma confinement Plasma density Plasma materials processing Plasma simulation Plasma waves Programmable logic arrays Voltage
Online Access:	Get full text
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