BaxWOy thick film as a carbon dioxide sensor

• Published in: 2011 IEEE SENSORS Proceedings pp. 1006 - 1009
• Main Authors: Cavanagh, L. M., Binions, R.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01-10-2011
• Subjects: Actuators; Carbon dioxide; Humidity; Sensitivity; Temperature sensors
• ISBN: 9781424492909; 1424492904
• ISSN: 1930-0395; 2168-9229
• DOI: 10.1109/ICSENS.2011.6126930

Thick film metal oxide semiconductor gas sensors with a Ba x WO y active layer have been prepared and evaluated as carbon dioxide gas sensor devices. Ba x WO y was prepared by thermal methods and screen-printed as porous thick films gas sensors. The sensor material was characterized by scanning electron microscopy and X-ray diffraction. The sensors gas response was investigated by exposure to varying concentrations of CO 2 gas in synthetic air and mixtures of CO and CO 2 all at a variety of different operating temperatures. Finally the gas response was examined to potential intereferant gases including humidity. It was found that at an operating temperature of 450 °C and a 2500 ppm pulse of CO 2 the sensors gave a gas response of 5.8, higher than current literature values. It was also found that increasing relative humidity enhanced the gas response in contrast to other approaches.