P5K-1 High Temperature Broadband Contact BAW Transducer

P5K-1 High Temperature Broadband Contact BAW Transducer

Aluminum nitride, AlN, point group 6 mm has shown much potential as a high temperature piezoelectric material for both SAW devices and BAW devices. The ability to grow large single crystals has facilitated interest in the material for such applications. It was shown in this report that AIN can be us...

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Bibliographic Details
Published in:2007 IEEE Ultrasonics Symposium Proceedings pp. 2389 - 2392
Main Authors: Parks, D.A., Tittmann, B.R.
Format: Conference Proceeding
Language:English
Published: IEEE 01-10-2007
Subjects:
Aluminum nitride
Conducting materials
Crystalline materials
Frequency
Piezoelectric devices
Piezoelectric materials
Piezoelectric transducers
Signal to noise ratio
Stress
Temperature distribution
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Summary:Aluminum nitride, AlN, point group 6 mm has shown much potential as a high temperature piezoelectric material for both SAW devices and BAW devices. The ability to grow large single crystals has facilitated interest in the material for such applications. It was shown in this report that AIN can be used as a contact BAW transducer up to 600 C. The upper limit was set by coupling as opposed to element failure and it is anticipated that AIN can be used at temperatures substantially beyond this range.
ISBN:1424413834
9781424413836
ISSN:1051-0117
DOI:10.1109/ULTSYM.2007.601