Recent Developments in Silicon-based MEMS Photonic Systems

Recent Developments in Silicon-based MEMS Photonic Systems

Silicon-based photonic MEMS modulate light by displacing microoptical elements such as micromirrors and microlenses. Recent development focus on fiber-laser couplers, multi-object spectrometers, and tunable cavities.

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Bibliographic Details
Published in:2007 4th IEEE International Conference on Group IV Photonics pp. 1 - 3
Main Authors: Noell, W., de Rooij, N.F., Epitaux, M., Hauffe, R., Overstolz, T., Petremand, Y., Waldis, S., Stanley, R., Zamkotsian, F., Zickar, M.
Format: Conference Proceeding
Language:English
Published: IEEE 01-09-2007
Subjects:
Adaptive optics
Lenses
Micromechanical devices
Micromirrors
Microoptics
Mirrors
Optical fiber couplers
Spectroscopy
Tunable circuits and devices
Vertical cavity surface emitting lasers
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Description
Summary:Silicon-based photonic MEMS modulate light by displacing microoptical elements such as micromirrors and microlenses. Recent development focus on fiber-laser couplers, multi-object spectrometers, and tunable cavities.
ISBN:9781424409341
1424409349
ISSN:1949-2081
1949-209X
DOI:10.1109/GROUP4.2007.4347660