Study of sensing properties to CH/sub 4/ of Pt/SnO/sub 2/:Sb thin film gas sensor in pulsing mode

• Published in: 2005 Siberian Conference on Control and Communications pp. 65 - 69
• Main Authors: Anisimov, O.V., Maksimova, N.K., Schogol, S.S., Chernykh, R.V., Chernikov, E.V.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 2005
• Subjects: Electrical resistance measurement; Gas detectors; Heating; Humidity; sensors of methane; Shape control; Temperature sensors; Testing; Thermal resistance; Thin film sensors; thin films; Tin; tin oxide; working temperature
• ISBN: 0780392191; 9780780392199
• DOI: 10.1109/SIBCON.2005.1611194

The resistance-time profiles of Pt/SnO/sub 2/:Sb thin films sensor of methane during cyclic variation of the working temperature have been studied. The time-period of one cycle was 10-12 min: 2 sec heating up to 400-570/spl deg/C and 8-10 sec down-heating to 80-150/spl deg/C. It was demonstrated the electrical and sensing properties of sensors as function of pulsing temperatures, methane concentration and humidity. It was shown that the using pulsing mode decreases the effect of humidity on the response to methane but does not provide the perfect stabilization of sensors parameters at humidity and environment temperatures variation.