Argon/tetramethysilane PECVD: From process diagnostic and modeling to a-SiC:H hard coating composition

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Bibliographic Details
Published in:	Diamond and related materials Vol. 16; no. 4-7; pp. 1259 - 1263
Main Authors:	Soum-Glaude, A., Thomas, L., Dollet, A., Ségur, P., Bordage, M.C.
Format:	Journal Article
Language:	English
Published:	Elsevier 01-04-2007
Subjects:	Physics
Online Access:	Get full text
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ISSN:	0925-9635
DOI:	10.1016/j.diamond.2006.11.003