Influence of the deposition parameters on the texture of boron nitride thin films synthesized in a microwave plasma-enhanced reactor
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Published in: | Surface & coatings technology Vol. 200; pp. 6444 - 6448 |
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Main Authors: | , , , , |
Format: | Journal Article |
Language: | English |
Published: |
Elsevier
2006
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Subjects: | |
Online Access: | Get full text |
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