Influence of the deposition parameters on the texture of boron nitride thin films synthesized in a microwave plasma-enhanced reactor

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Bibliographic Details
Published in:	Surface & coatings technology Vol. 200; pp. 6444 - 6448
Main Authors:	Thevenin, P., Eliaoui, M., Ahaitouf, A., Soltani, A., Bath, A.
Format:	Journal Article
Language:	English
Published:	Elsevier 2006
Subjects:	Optics Physics
Online Access:	Get full text
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ISSN:	0257-8972 1879-3347