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Bibliographic Details
Published in:	Journal of electronic materials Vol. 35; no. 1; p. 1
Main Authors:	Chen, Sinn-Wen, Kao, C. Robert, Lee, Hyuck Mo, Mohney, Suzanne, Suganuma, Katsuaki, Swenson, Douglas J., Chada, Srinivas
Format:	Journal Article
Language:	English
Published:	01-01-2006
Online Access:	Get full text
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Description
ISSN:	0361-5235 1543-186X
DOI:	10.1007/s11664-006-0175-0