Ferroelectricity Improvement in Ultra‐Thin Hf 0.5 Zr 0.5 O 2 Capacitors by the Insertion of a Ti Interfacial Layer

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Bibliographic Details
Published in:	Physica status solidi. PSS-RRL. Rapid research letters Vol. 16; no. 10
Main Authors:	Segantini, Greta, Barhoumi, Rabei, Manchon, Benoît, Cañero Infante, Ingrid, Rojo Romeo, Pedro, Bugnet, Matthieu, Baboux, Nicolas, Nirantar, Shruti, Deleruyelle, Damien, Sriram, Sharath, Vilquin, Bertrand
Format:	Journal Article
Language:	English
Published:	01-10-2022
Online Access:	Get full text
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