EFFECTS OF Pt/SrRuO3 TOP ELECTRODES ON FERROELECTRIC PROPERTIES OF EPITAXIAL (Pb, La)(Zr, Ti)O3 THIN FILMS
Epitaxially c-axis oriented PLZT films with the composition (Pb0.925La0.075)(Zr0.4Ti0.6)O3 were deposited on Pt/MgO(100) substrate by rf-magnetron sputtering using a compacted powder target with the composition (0.8PLZT+0.2PbO). Pt/SrRuO3(SRO)/PLZT/Pt capacitors were fabricated by forming Pt/SRO top...
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| Published in: | Jpn.J.Appl.Phys ,Part 1. Vol. 39, no. 9B, pp. 5451-5455. 2000 Vol. 39; no. 9B; pp. 5451 - 5455 |
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| Main Authors: | , , , , , |
| Format: | Journal Article |
| Language: | English |
| Published: |
2000
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| Online Access: | Get full text |
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| Summary: | Epitaxially c-axis oriented PLZT films with the composition (Pb0.925La0.075)(Zr0.4Ti0.6)O3 were deposited on Pt/MgO(100) substrate by rf-magnetron sputtering using a compacted powder target with the composition (0.8PLZT+0.2PbO). Pt/SrRuO3(SRO)/PLZT/Pt capacitors were fabricated by forming Pt/SRO top electrodes onto PLZT films. The 206-nm-thick PLZT films with layered Pt/SRO top electrodes exhibited a slightly high leakage current at a low electric field, compared with PLZT films with the same thickness and a single Pt top electrode. The values of switchable polarization after 1010 cycles for Pt/PLZT/Pt capacitors decreased up to around 17% of their initial values, whereas the switchable polarization for Pt/SRO/PLZT/Pt capacitors hardly exhibited any fatigue degradation due to polarization reversal. The layered Pt/SRO is useful as a top-electrode material for fabricating the low leakage and high endurance ferroelectric capacitors. 7 refs. |
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| Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
| ISSN: | 0021-4922 |
| DOI: | 10.1143/JJAP.39.5451 |