Effect of interfacial states on the technological variability of trigate MOSFETs
This work studies the influence of the interfacial states on the performance of Trigate MOSFETs and, specifically, on the Subthreshold Swing (SS) and threshold voltage (V T ) variability. To do so, a solver for the 2D Schrödinger-Poisson coupled equation system has been developed, including the eff...
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Published in: | 2012 IEEE Silicon Nanoelectronics Workshop (SNW) pp. 1 - 2 |
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Main Authors: | , , , , |
Format: | Conference Proceeding |
Language: | English |
Published: |
IEEE
01-06-2012
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Subjects: | |
Online Access: | Get full text |
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Summary: | This work studies the influence of the interfacial states on the performance of Trigate MOSFETs and, specifically, on the Subthreshold Swing (SS) and threshold voltage (V T ) variability. To do so, a solver for the 2D Schrödinger-Poisson coupled equation system has been developed, including the effects of interfacial states (D it ). Different D it (E) profiles have been considered, analyzing their influence for several device geometries. |
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ISBN: | 1467309966 9781467309967 |
ISSN: | 2161-4636 2161-4644 |
DOI: | 10.1109/SNW.2012.6243295 |