Development of thick metal mesh THz-filters by LIGA-technology for high-power applications at Novosibirsk terahertz FEL

• Published in: 2007 Joint 32nd International Conference on Infrared and Millimeter Waves and the 15th International Conference on Terahertz Electronics pp. 978 - 979
• Main Authors: Kuznetsov, S.A., Goldenberg, B.G., Kubarev, V.V., Eliseev, V.S., Kalinin, P.V., Kondratiev, V.I., Petrova, E.V., Pindyurin, V.F., Vinokurov, N.A.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01-09-2007
• Subjects: Attenuation; Filters; Filtration; Free electron lasers; Frequency; LIGA-technology; Manufacturing; metal mesh filters; Metallization; Microstructure; Submillimeter wave technology; terahertz radiation; X-ray lasers
• ISBN: 1424414385; 9781424414383
• ISSN: 2162-2027
• DOI: 10.1109/ICIMW.2007.4516817

In this paper we report about initiating technological development of thick metal mesh structures intended for frequency filtration of high-power terahertz radiation of Novosibirsk free electron laser. The technology is based on the promising LIGA-technique which employs the effect of high penetrability of X-rays into roentgenosensitive resistive layers and destined for manufacturing microstructures with extremely high aspect ratios. Due to high metallization thickness comparable with radiation wavelength LIGA-structures are expected to be much more mechanically firm and thermostable than conventional photolithographic filters, as well as to provide much higher low-frequency attenuation due to a waveguide cutoff effect. The main stages of the LIGA-technique being mastered in the Siberian Synchrotron Radiation Center are described in the paper.