Self-Leveling Micromechanical Gas Sensors

Self-Leveling Micromechanical Gas Sensors

We present the design, construction and initial testing of a new type of micromechanical bending-type gas sensor structure which is more resistant to ambient temperature changes than conventional cantilever beams. The new devices are constructed utilizing a self-leveling geometry that minimizes comm...

Full description

Saved in:
Bibliographic Details
Published in:2018 IEEE SENSORS pp. 1 - 4
Main Authors: Likhite, R., Banerjee, A., Kim, H., Mastrangelo, C. H.
Format: Conference Proceeding
Language:English
Published: IEEE 01-10-2018
Subjects:
bending beam
gas sensing
self-leveling
thermal deflection
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We present the design, construction and initial testing of a new type of micromechanical bending-type gas sensor structure which is more resistant to ambient temperature changes than conventional cantilever beams. The new devices are constructed utilizing a self-leveling geometry that minimizes common-mode mechanical deflections induced by temperature changes while producing differential deflections sensitive to gas concentration. Preliminary experiments with water vapor sensing indicate the common mode thermal deflection of the new sensor geometry is reduced by 2.3 fold compared to that observed on a conventional microcantilever-based gas sensor. Unassisted recovery of the sensor action was also observed in 17 seconds.
ISSN:2168-9229
DOI:10.1109/ICSENS.2018.8589579