Precision control of piezoelectric actuator using fuzzy feedback control with inverse hysteresis compensation

Piezoelectric actuators are widely employed in nanopositioning applications. The main drawback of piezoelectric actuator is the hysteresis characteristics. This paper presents the precision control of the output displacement for a piezoelectric actuator through fuzzy feedback control combined with i...

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Bibliographic Details
Published in:	10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems pp. 219 - 224
Main Authors:	Ziqiang Chi, Qingsong Xu
Format:	Conference Proceeding
Language:	English
Published:	IEEE 01-04-2015
Subjects:	Feedback control feedforward compensation Feedforward neural networks Fuzzy control Hysteresis hysteresis characteristics Mathematical model Niobium PD control Piezoelectric actuator Preisach model
Online Access:	Get full text
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Summary:	Piezoelectric actuators are widely employed in nanopositioning applications. The main drawback of piezoelectric actuator is the hysteresis characteristics. This paper presents the precision control of the output displacement for a piezoelectric actuator through fuzzy feedback control combined with inverse model-based feedforward compensation. Firstly, the Preisach model is established to describe the hysteresis of piezoelectric actuator. Then, a feedforward compensator is designed using an input correction iteration algorithm. Afterwards, three kinds of fuzzy control methods including fuzzy control, two-input fuzzy PID control, and three-input fuzzy PID control are designed and realized, and numerical simulation experiments are carried out, respectively. Through a comparative study of the numerical results, the advantages and disadvantages of each kind of fuzzy control method are disclosed.
DOI:	10.1109/NEMS.2015.7147414