A low insertion loss 60 GHz band pass filter using wafer transfer

• Published in: 2008 Asia-Pacific Microwave Conference pp. 1 - 4
• Main Authors: Luo, B., Guo, Y.X., Wang, J.P., Liao, E.B.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01-12-2008
• Subjects: Band pass filters; Coplanar waveguides; Dielectric loss measurement; Dielectric measurements; Dielectric substrates; Frequency; Insertion loss; Loss measurement; Microwave filters; Millimeter wave circuits
• ISBN: 9781424426416; 1424426413
• ISSN: 2165-4727; 2165-4743
• DOI: 10.1109/APMC.2008.4958180

In this paper, a low insertion loss band pass filter using WTT for 60 GHz band applications is presented. The filter geometry was pre-fabricated on a Si wafer with 3-um-thick Cu and 1KA SiN dielectric layer. Then this filter pattern was transferred onto the substrate Rogers RT/Duroid 5880. In this design, by replacing the silicon substrate with the Rogers RT/Duroid 5880 base, a low insertion loss 60 GHz band pass filter has been achieved. The measurement results show this filter has a 3dB band width of 7.5 GHz and insertion loss is 1.8 dB. Measured results are consistency with the HFSS simulation results.