Proposed one-dimensional passive array test circuit for parallel kelvin measurement with efficient area use

Proposed one-dimensional passive array test circuit for parallel kelvin measurement with efficient area use

A test structure and measurement method are proposed that permits measurement of several resistors in parallel using a kelvin method with only two independent pads per device. This technique allows rapid measurement of several different resistors with efficient area usage and a simple and adaptable...

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Bibliographic Details
Published in:2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS) pp. 85 - 88
Main Authors: Rerecich, Matthew, Young, Chadwin D.
Format: Conference Proceeding
Language:English
Published: IEEE 01-03-2019
Subjects:
Current measurement
Electrical resistance measurement
Kelvin
kelvin measurement
Measurement uncertainty
microelectronic test structure
parallel test
Resistance
resistor
Resistors
Voltage measurement
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Description
Summary:A test structure and measurement method are proposed that permits measurement of several resistors in parallel using a kelvin method with only two independent pads per device. This technique allows rapid measurement of several different resistors with efficient area usage and a simple and adaptable circuit architecture.
ISBN:9781728114644
1728114640
ISSN:1071-9032
2158-1029
DOI:10.1109/ICMTS.2019.8730948