Materials surface modification from the point of view of plasma physicist

• Published in: The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts p. 429
• Main Authors: Alexandrov, A.F., Bugrov, G.E., Kondranin, S.C., Kralkina, E.A., Pavlov, V.B., Plaksin, V.Yu, Savonov, V.P., Stepanov, A.V., Vavilin, K.V.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 2003
• Subjects: Atmospheric-pressure plasmas; Crystallization; Gases; Ion beams; Particle beams; Plasma diagnostics; Plasma materials processing; Production facilities; Rapid thermal annealing; Rapid thermal processing
• ISBN: 9780780379114; 078037911X
• ISSN: 0730-9244; 2576-7208
• DOI: 10.1109/PLASMA.2003.1229999

Summary form only given, as follows. The survey of the literature shows that there are only few cases when understanding of the advantages that can provide certain method of surface modification is available. In order to find the answers to brought up questions the following program of investigations was made up study of ion and radical beams interactions with solids and determination optimal conditions for surface modification choice of the low and atmospheric plasma conditions that can provide similar ion beam energy and ion dose to that existing in the best and ion and radical beam experiments. The latter problem requires the development of the set of plasma diagnostic methods that can be applied to low pressure as well to atmospheric pressure plasma. The present paper introduces the first results obtained following the program. First experiments were aimed on the determination of the optimal conditions of surface modification by ion beams, ion beams with different pressure environment gases, ion beams with environment gases enriched by radicals and electrons. In parallel low and atmospheric pressure plasma with different energy ion flows was generated. The non-contact method of ion energy estimation was approved using low pressure plasma and applied for estimation of ions energy interacting with samples in atmospheric pressure plasma. Generated plasma was used for polymer surface modification.