Nb2O5 thin films obtained by chemical spray pyrolysis

• Published in: Surface and interface analysis Vol. 36; no. 8; pp. 888 - 891
• Main Authors: Romero, R., Ramos-Barrado, J. R., Martin, F., Leinen, D.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Chichester, UK John Wiley & Sons, Ltd 01-08-2004; Wiley
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Nb2O5; Physics; SEM; spray pyrolysis; XPS; Water; Scanning electron microscopy; Pyrolysis; Annealing; Inorganic compounds; Roughness; Glass; Amorphous state; Thin films; Hexagonal lattices; Temperature effects; Silicon oxides; spray pyrolysis; XPS; SEM; Hexagonal phase; Nb2O5; Depth profiles; X-ray photoelectron spectra
• ISSN: 0142-2421; 1096-9918
• DOI: 10.1002/sia.1793

Nb2O5 thin films have been prepared by chemical spray pyrolysis on fused silica and glass substrates from a 10−2 M NbCl5 precursor solution of 50% bidistilled water, 49% ethanol and 1% acetic acid. The films are of compact material with high surface roughness, that decrease with increasing substrate temperature (350 °C to 500 °C) while the deposition velocity decreases. All as‐deposited films are amorphous. Post‐annealing in air to temperatures higher than 500 °C leads to a distorted hexagonal crystal phase. With XPS and depth profiling, the stoichiometry and residuals from the precursor solution in these films have been investigated. In particular, the decomposition of the alcoholic component by post‐annealing could be followed with XPS. Copyright © 2004 John Wiley & Sons, Ltd.