Low-loss and high contrast silicon-on-insulator (SOI) arrayed waveguide grating

We report high-extinction and low-loss 40-channel × 100-GHz arrayed waveguide grating (AWG) fabricated on silicon-on-insulator using high quality etching condition resulting in <; 0.8 dB/cm loss and low phase errors.

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Bibliographic Details
Published in:	2012 Conference on Lasers and Electro-Optics (CLEO) pp. 1 - 2
Main Authors:	Cheung, S. T. S., Guan, B., Djordjevic, S. S., Okamoto, K., Yoo, S. J. B.
Format:	Conference Proceeding
Language:	English
Published:	IEEE 01-05-2012
Subjects:	Arrayed waveguide gratings Loss measurement Plasmas Resists Silicon Waveguide discontinuities
Online Access:	Get full text
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Description
Summary:	We report high-extinction and low-loss 40-channel × 100-GHz arrayed waveguide grating (AWG) fabricated on silicon-on-insulator using high quality etching condition resulting in <; 0.8 dB/cm loss and low phase errors.
ISBN:	1467318396 9781467318396
ISSN:	2160-8989 2160-9004
DOI:	10.1364/CLEO_SI.2012.CM4A.5