Implementation of a simulation-based short-term lot arrival forecast in a mature 200mm semiconductor FAB

• Published in: Proceedings of the 2011 Winter Simulation Conference (WSC) pp. 1927 - 1938
• Main Authors: Scholl, W., Boon Ping Gan, Lendermann, P., Noack, D., Rose, O., Preuss, P., Pappert, F. S.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01-12-2011
• Subjects: Data models; Engines; Load modeling; Predictive models; Production; Semiconductor device modeling
• ISBN: 1457721082; 9781457721083
• ISSN: 0891-7736; 1558-4305
• DOI: 10.1109/WSC.2011.6147907

The ability to perform lot arrival forecast at work center level is a key requirement for pro-active FAB operation management. Visibility to this information enables preemptive resource allocation and bottleneck management. Today, the work center lot arrival forecast is achieved through the use of short term simulation technique in Infineon Dresden. High fidelity simulation model that includes detailed modeling feature such as attribute-based sampling procedure, dedication and temporary tool blocking is built automatically through the transformation of data queries from data sources. In this paper, we present the results of our model validation work, comparing the FAB and forecasted lot arrival of the defect density measurement work center. Due to the high capacity demand of automotive product that requires more than 20 inspection steps; engineering lots and preventive maintenance of DDM must be scheduled at the right time. This can only be achieved with high quality lot arrival forecast.