MEMS-tunable 1.55-μm VCSEL with extended tuning range incorporating a buried tunnel junction

• Published in: IEEE photonics technology letters Vol. 18; no. 5; pp. 688 - 690
• Main Authors: Maute, M., Kogel, B., Bohm, G., Meissner, P., Amann, M.-C.
• Format: Journal Article
• Language: English
• Published: IEEE 01-03-2006
• Subjects: Antireflection coatings; Biomembranes; Confinement; Electric power generation; Laser excitation; Laser modes; Laser tuning; Microelectromechanical systems (MEMS); Mirrors; Pump lasers; semiconductor lasers; Simulation; Surface emitting lasers; Surface waves; Tunable circuits and devices; tunable lasers; Tuning; Tunnel junctions; Vertical cavity surface emission lasers; Vertical cavity surface emitting lasers; vertical-cavity surface-emitting lasers (VCSELs); Wavelengths
• ISSN: 1041-1135; 1941-0174
• DOI: 10.1109/LPT.2006.870066

We present an electrically pumped and micromechanically tunable InP-based vertical-cavity surface-emitting laser operating in the 1.55-μm wavelength range. The current confinement is achieved by a buried tunnel junction. The GaAs-based movable top mirror membrane is fabricated separately, assembled on top of the device, and can be actuated electrothermally. A single mode output power of about 1.7 mW and a tuning range of 28 nm was obtained. By the use of an antireflection coating at the semiconductor-air-interface, we were able to extend the tuning range up to 60 nm as expected from one-dimensional simulations.