High-performance three-dimensional on-chip inductors fabricated by novel micromachining technology for RF MMIC

High-performance three-dimensional on-chip inductors fabricated by novel micromachining technology for RF MMIC

Using novel micromachining technology, various three-dimensional (3D) on-chip inductors have been fabricated to achieve high performance and small area occupation for GHz applications. We have obtained 14 nH, a peak Q of 38 at 1.8 GHz with area occupation of 500 /spl mu/m by 500 /spl mu/m excluding...

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Bibliographic Details
Published in:1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282) Vol. 4; pp. 1523 - 1526 vol.4
Main Authors: Yoon, Jun-Bo, Han, Chul-Hi, Yoon, Euisik, Kim, Choong-Ki
Format: Conference Proceeding Journal Article
Language:English
Published: IEEE 1999
Subjects:
Copper
Electrodes
Etching
Fabrication
Frequency
Inductors
Micromachining
Nickel
Resists
Spirals
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Summary:Using novel micromachining technology, various three-dimensional (3D) on-chip inductors have been fabricated to achieve high performance and small area occupation for GHz applications. We have obtained 14 nH, a peak Q of 38 at 1.8 GHz with area occupation of 500 /spl mu/m by 500 /spl mu/m excluding pads (56 nH/mm/sup 2/) from a stacked spiral inductor on a glass substrate. Also, 1.75 nH and a peak Q of 57 at 10 GHz have been obtained from a levitated spiral inductor.
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ISBN:0780351355
9780780351356
ISSN:0149-645X
DOI:10.1109/MWSYM.1999.780245