Characterization of DC N2O Plasma Discharge Using Optical Emission Spectroscopy

• Published in: IEEE transactions on plasma science Vol. 48; no. 1; pp. 173 - 178
• Main Authors: Yousif, F. B., Lopez, Juan, Rodriguez, J., Fuentes, B. E., Martinez, H. M.
• Format: Journal Article
• Language: English
• Published: New York IEEE 01-01-2020; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Atomic oxygen; Discharges (electric); Emission measurements; Emission spectroscopy; Ions; Langmuir probe; low temperature plasmas; Nitrous oxide; Optical emission spectroscopy; Optical variables measurement; Plasma; Plasma jets; plasma science; Plasmas; Pressure measurement; Spectroscopy; Spectrum analysis; Stimulated emission
• ISSN: 0093-3813; 1939-9375
• DOI: 10.1109/TPS.2019.2958990

We report in this article the optical emission spectroscopy (OES) measurements for N 2 O dc discharge in the pressure range between 0.1 and 0.6 mbar. The emission bands were observed and measured in the wavelength range of 200-1100 nm. The intensity of the principal species observed for N 2 , N 2 + , O + , O 2 , O 2 + , NO, and N 2 O + was investigated as a function of pressure and discharge power. The origin of emission bands and lines was discussed. N 2 + and N 2 were observed to be the dominant emission lines, on one hand, while no emission lines were observed for atomic oxygen and nitrogen.